2"DPSS |
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Inspection |
Item |
Detail |
Spec |
Description |
SEM |
Width |
Average |
2.70±0.15um |
◇Flat-top shaped pattern not allowed |
Unif. |
≤5% |
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Height |
Average |
1.65±0.15um |
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Unif. |
≤5% |
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Scope Inspection |
Particle |
<50um* |
≤100ea |
◇No
visible particle on wafer |
[50um,250um]* |
≤30ea |
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[250um,500um]* |
≤20ea |
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[500um,1500um]* |
≤10ea |
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>1500um* |
0 |
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Pattern Missing |
<50um* |
≤80ea |
◇The total length shoud be less than 2mm |
|
[50um,250um]* |
≤30ea |
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[250um,500um]* |
≤15ea |
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[500um,1500um]* |
≤8ea |
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>1500um* |
0 |
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Pattern Fail |
<50um* |
≤80ea |
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[50um,250um]* |
≤30ea |
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[250um,500um]* |
≤15ea |
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[500um,1500um]* |
≤8ea |
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>1500um* |
0 |
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Scratch |
≤1.2mm |
≤7ea |
◇width≤60um and lenth≤1.2mm should be judged as
1ea |
|
Edge Bead |
Edge Bead |
≤1.8mm |
◇The
pattern failed within the 1.8mm area from the wafer edge should not be
counted |
|
Abnormal Shape |
Abnormal Shape |
≤3% |
Total area of abormal shape pattern should be less than 3% |